Effects of Nitrogen Content on Microstructure and Mechanical Properties of High Entropy Nitride Coatings: DC Magnetron Sputtered Cr-Mn-Mo-Si-Y-(N) System

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Authors

VRÁNA Lukáš STASIAK Tomasz FEKETE Matej BURŠÍKOVÁ Vilma SOUČEK Pavel

Year of publication 2024
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description High entropy alloys are composed of at least five elements with a concentration of 5-35 at. %. Their derivative, high entropy nitrides, exhibit properties such as hardness within the superhard region, high fracture toughness together with impressive wear resistance, and thermal stability at elevated temperatures. Such properties are essential for protective coatings, which must withstand demanding conditions involving large forces and high temperatures. Our study aims to investigate the microstructure and mechanical properties of Cr-Mn-Mo-Si-Y-(N) coatings. These were prepared by direct current magnetron sputtering, a physical vapor deposition method that employs ions from plasma for target sputtering. Different deposition conditions such as varying nitrogen flow, substrate temperature, and substrate bias were investigated. The analysis of the coatings was focused on evaluating chemical composition, surface morphology, crystallography, and mechanical properties.
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