Spatial-resolved optical emission spectroscopy of the spoke in non-reactive HiPIMS

Šlapanská,  Marta; Kroker,  Michael; Hnilica,  Jaroslav; Klein,  Peter; Vašina,  Petr

Spatial-resolved optical emission spectroscopy of the spoke in non-reactive HiPIMS

Warning

This publication doesn't include Faculty of Economics and Administration. It includes Faculty of Science. Official publication website can be found on muni.cz.

Authors	ŠLAPANSKÁ Marta KROKER Michael HNILICA Jaroslav KLEIN Peter VAŠINA Petr
Year of publication	2021
Type	Article in Proceedings
Conference	23rd Symposium on Application of Plasma Processes, Book of Contributed Papers
MU Faculty or unit	Faculty of Science
Citation
Web	http://neon.dpp.fmph.uniba.sk/sapp/
Keywords	HiPIMS, ionisation zones, spokes, optical emission spectroscopy, titanium
Related projects:	Pokročilá diagnostika reaktivního HiPIMS plazmatu pro depozici oxidových, nitridových a sulfidových vrstev