Evolution of Titanium Atom and Ion Density in Reactive HiPIMS - Impact on Hysteresis Curve Shape
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| Year of publication | 2017 |
| Type | Conference abstract |
| MU Faculty or unit | |
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| Description | Likewise as the reactive dc or pulsed-dc sputtering, the R-HiPIMS undergoes hysteresis behaviour, however the hysteresis may be minimised or even suppressed by optimizing the R-HiPIMS process parameters. The exact mechanism behind the hysteresis suppression is still unknown and therefore this issue is yet highly disputed in the scientific community. In this paper, we report the evolution of the sputtered Ti atom and ion ground state densities in R-HiPIMS for both nitrogen and oxygen gasses. |
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