Report on spoke rotation, merging and splitting in HiPIMS plasma
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Year of publication | 2017 |
Type | Conference abstract |
MU Faculty or unit | |
Citation | |
Description | The presented spoke study was performed in both non-reactive as well as reactive nitrogen HiPIMS plasma using simultaneous broadband optical screening via ICCD camera (200 ns time scale) and strip probes embedded into the niobium target. Strip probes measured actual local current delivered to the target. Spoke merging and splitting was detected by both employed methods. |
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