Plasma enhanced chemical vapor deposition of organosilicon thin films on electrospun polymer nanofibers

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Authors

ZAJÍČKOVÁ Lenka KEDROŇOVÁ Eva HEGEMANN Dirk MIKMEKOVÁ Eliška KLÍMA Miloš MICHLÍČEK Miroslav

Year of publication 2013
Type Article in Proceedings
Conference Book of Contributed Papers: 19th Symposium on Application of Plasma Processes
MU Faculty or unit

Faculty of Science

Citation
Web http://neon.dpp.fmph.uniba.sk/sapp
Field Plasma physics
Keywords PECVD; organosilocon layers; nanofibers
Description Organosilicon plasma polymers were prepared from hexamethyldisiloxane / argon mixtures in low pressure rf discharges with capacitive coupling and by cold rf plasma multi-jet working at atmospheric pressure. The frequency of applied voltage was in both cases 13.56 MHz. The films were prepared on PVA and PA6 electrospun fabrics and on silicon and glass substrates for reference purposes. The coatings were characterized by scanning electron microscopy (SEM), Fourier transform infrared spectroscopy, atomic force microscopy and contact angle measurement. SEM revealed that the microstructure of coatings differed significantly when changing the plasma conditions.
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