Deposition of thin zinc films by atmospheric pressure plasma jet in aqueous media

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Authors

GALMIZ Oleksandr BRABLEC Antonín KUDRLE Vít

Year of publication 2016
Type Article in Proceedings
Conference Hakone XV: International Symposium of High Pressure low Temperature Plasma Chemistry
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords atmospheric plasma jet; thin film deposition; zinc
Description Argon plasma jet was operated at atmospheric pressure in contact with aqueous solution of a zinc salt in order to deposit thin films on silicon substrates immersed in the liquid. The thickness of the films was determined by a profilometer while the chemical composition was analysed by XPS technique. The experiments revealed the importance of the submersion depth of the substrate which strongly affects the energy and particle influx.
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