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Zařízení pro plazmovou úpravu substrátů v povrchovém bariérovém výboji

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Title in English Devices for plasma treatment of substrates in surface barrier discharge
Authors

SŤAHEL Pavel ČERNÁK Mirko ZEMÁNEK Miroslav

Year of publication 2015
MU Faculty or unit

Faculty of Science

Description Mobile device for surface treatment of samples by surface discharges, The device is particularly suitable for the surface treatment of flat substrates
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