Observation of cathode voltage and discharge current oscillations and spoke behaviour in HiPIMS
| Authors | |
|---|---|
| Year of publication | 2015 |
| Type | Article in Proceedings |
| Conference | Book of Contributed Papers |
| MU Faculty or unit | |
| Citation | |
| Web | https://munispace.muni.cz/index.php/munispace/catalog/book/792 |
| Field | Plasma physics |
| Keywords | HiPIMS; spokes; magnetron sputtering; plasma instabilities |
| Description | The oscillations were observed on cathode voltage and discharge current temporal evolution in HiPIMS pulse. The frequency of the oscillations depends at given pressure only on actual value of the discharge current. Rotation of the spokes over the cathode and the frequency of the oscillations shows different trends. The oscillations are observed at conditions where at least certain critical amount of spokes emerges. |
| Related projects: |