Antireflexní vrstva (SiO2/Al2O3/MgF2) pro dalekou ultrafialovou (FUV, VUV) oblast spektra na vlnové délce 193nm

Březina, Jaromír; Franta,  Daniel

Antireflexní vrstva (SiO2/Al2O3/MgF2) pro dalekou ultrafialovou (FUV, VUV) oblast spektra na vlnové délce 193nm

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Title in English	Antireflection coating (SiO2/Al2O3/MgF2) for the far ultraviolet (FUV, VUV) region of the spectrum at the wavelength of 193nm
Authors	BŘEZINA Jaromír FRANTA Daniel
Year of publication	2014
MU Faculty or unit	Faculty of Science
Description	*Triple-layer antireflection coating (SiO2/Al2O3/MgF2) for the far ultraviolet (FUV, VUV) region of the spectrum at the wavelength of 193nm
Related projects:	Optimalizace vrstevnatých systémů používaných v optickém průmyslu