Antireflexní vrstva (SiO2/Al2O3/MgF2) pro dalekou ultrafialovou (FUV, VUV) oblast spektra na vlnové délce 193nm

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Title in English Antireflection coating (SiO2/Al2O3/MgF2) for the far ultraviolet (FUV, VUV) region of the spectrum at the wavelength of 193nm
Authors

BŘEZINA Jaromír FRANTA Daniel

Year of publication 2014
MU Faculty or unit

Faculty of Science

Description *Triple-layer antireflection coating (SiO2/Al2O3/MgF2) for the far ultraviolet (FUV, VUV) region of the spectrum at the wavelength of 193nm
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