Antireflexní vrstva (Al2O3/MgF2) pro hlubokou ultrafialovou (DUV) oblast spektra na vlnové délce 266nm

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Title in English Antireflection coating (Al2O3/MgF2) for the deep ultraviolet (DUV) region of the spectrum at the wavelength of 266nm
Authors

BŘEZINA Jaromír FRANTA Daniel

Year of publication 2014
MU Faculty or unit

Faculty of Science

Description *Double-layer antireflection coating (Al2O3/MgF2) for the deep ultraviolet (DUV) region of the spectrum at the wavelength of 266nm
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