Zařízení ke snížení nebo odstranění organické a anorganické kontaminace vakuového systému zobrazovacích a analytických zařízení

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Title in English Device for reducing or removing organic and inorganic contamination of vacuum system of display and analytic devices
Authors

SŤAHEL Pavel ČERNÁK Mirko NAVRÁTIL Zdeněk HANIČINEC Martin JIRUŠE Jaroslav FIALA Jiří

Year of publication 2014
MU Faculty or unit

Faculty of Science

Description Device for removing contamination in a low pressure analytical apparatuses by photocatalytic process. This process runs during exposure with UV radiation. Application no. 2014-29163
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