Preparation of hard TiC/a-C:H coatings using hybrid PVD-PECVD process with rotating cylindrical magnetron

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Authors

ŽEMLIČKA Radek JÍLEK Mojmír VOGL Petr SOUČEK Pavel BURŠÍKOVÁ Vilma VAŠINA Petr

Year of publication 2013
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description This work deal with preparation of hard nc-TiC/a-C:H coatings using hybrid PVD-PECVD process with rotating cylindrical magnetron.
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