Preparation of hard TiC/a-C:H coatings using hybrid PVD-PECVD process with rotating cylindrical magnetron
| Authors | |
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| Year of publication | 2013 |
| Type | Conference abstract |
| MU Faculty or unit | |
| Citation | |
| Description | This work deal with preparation of hard nc-TiC/a-C:H coatings using hybrid PVD-PECVD process with rotating cylindrical magnetron. |
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