ON SPUTTERED PARTICLE DISTRIBUTION TOWARDS SUBSTRATE DURING TARGET EROSION - SIMULATION AND EXPERIMENT
| Authors | |
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| Year of publication | 2013 |
| Type | Conference abstract |
| MU Faculty or unit | |
| Citation | |
| Description | It is commonly observed that thin layers, especially formed by compound material deposited in planar magnetron using the same deposition manners, can have slightly different properties and composition depending on the substrate position. This research shows that one of the important factors to be considered thinking about fluxes of different species on the substrate is the target erosion state. |
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