Optical diagnostics of atmospheric-pressure RF discharge generated in rare gases
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| Year of publication | 2013 |
| Type | Conference abstract |
| MU Faculty or unit | |
| Citation | |
| Description | Capacitively coupled radio-frequency (ccrf) discharge generated at atmospheric pressure in helium and neon have been studied by OES. In previous studies was found out that ccrf discharge in helium is homogeneous in so called alpha-mode and for instance a formation of a dark space between the cathode layer and the temporary cathode was observed. Aim of this work is the investigation of the alpha-mode in neon and comparison of main characteristics with helium discharge. |
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