On the effect of carbon content on the mechanical properties of nc-TiC/a-C:H coatings prepared by balanced magnetron sputtering

Souček,  Pavel; Schmidtová,  Tereza; Zábranský,  Lukáš; Buršíková,  Vilma; Vašina,  Petr; Caha,  Ondřej; Buršík, Jiří; Peřina, Vratislav

On the effect of carbon content on the mechanical properties of nc-TiC/a-C:H coatings prepared by balanced magnetron sputtering

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Authors	SOUČEK Pavel SCHMIDTOVÁ Tereza ZÁBRANSKÝ Lukáš BURŠÍKOVÁ Vilma VAŠINA Petr CAHA Ondřej BURŠÍK Jiří PEŘINA Vratislav
Year of publication	2011
Type	Conference abstract
MU Faculty or unit	Faculty of Science
Citation
Description	Thick hard adherent nc-TiC/a-C:H coatings were prepared by a hybrid PVD-PECVD process of Ti target sputtering in Ar/C2H2 atmosphere. The effect of carbon content on mechanical properties such as hardness, Young’s modulus and internal stress is studied in this contribution.
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