Higher harmonics of plasma potential in capacitively coupled discharges
| Authors | |
|---|---|
| Year of publication | 2009 |
| Type | Article in Proceedings |
| Conference | Frontiers in Low Temperature Plasma Diagnostics 8 - Book of abstracts |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | higher harmonics; plasma; discharge; plasma potential |
| Description | Measurement of the waveform of the plasma potential and its harmonic frequencies was made by means of an uncompensated probe. The analysis of the measured data requires a model of the sheath around the probe. |
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