Laser Ablation Time-of-Flight Mass Spectrometry LA-TOF-MS of Nitrogen Doped Diamond-Like Carbon DLN Nano-Layers

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Authors	HAVEL Josef BURŠÍKOVÁ Vilma ŘEHULKA Pavel CHMELÍK Josef ALBERTI Milan ŠPALT Zbyněk JANČA Jan
Year of publication	2007
Type	Article in Periodical
Magazine / Source	Journal of Physics and Chemistry of Solids
MU Faculty or unit	Faculty of Science
Citation
Web	http://www.elsevier.com
Field	Plasma physics
Keywords	Diamond like thin films; Amorphous materials; Vapor deposition
Description	Nitrogen-doped diamond-like carbon layers (a-C:H:N, N-DLC or DLN) were prepared by the plasma enhanced chemical vapor deposition (PECVD) technique.The films, of differing deposition times,were subjected to laser ablation time-of-flight (LA-TOF) mass spectrometric measurements.The analysis of mass spectra was made and the following positively singly-charged species were detected and identified: Cn+ (n = 4 - 30), Sin+ (n = 2, 3),SinH+ (n = 2, 3), SiOK+, Si3H4+, Si2N+, Si2NH2+, and Si3C+.
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface