Analysis of the Transport of Ionized Titanium Atoms in a Highly Ionized Sputter Deposition Process

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Authors	DE POUCQUES Ludovic IMBERT Jean-Christophe BOISSE-LAPORTE Carolline BRETAGNE Jean GANCIU Mihai TEULÉ-GAY Lionel VAŠINA Petr TOUZEAU Michel
Year of publication	2007
Type	Article in Periodical
Magazine / Source	Plasma processes and polymers
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	ambipolar difussion; charged particle transport; high power pulsed; magnetron sputtering
Description	The paper study transport of ionized sputtered particles by means of time and space resolved optical absorption spectroscopy - we concluded that the transport is govern maainly by ambipolar difussion.
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface