Hydrogen dissociation degree in capacitively coupled discharge
| Authors | |
|---|---|
| Year of publication | 2007 |
| Type | Article in Proceedings |
| Conference | 16th Symposium on Application of Plasma Processes - Book of Abstracts |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | hydrogen; dissociation degree; plasma |
| Description | Results of optical emission spectroscopy of hydrogen low-pressure capacitively coupled RF discharge are presented. It was shown, that the dissociation degree of hydrogen molecules was sensitive to the sheath voltages. Further, the plasma temperatures were measured. |
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