Comparison of evaluating methods of thin films nanohardness

Buršíková,  Vilma; Hajkova, P.; Louda, P.; Spatenka, P.; Kolouch, A.; Blahova, O.

Comparison of evaluating methods of thin films nanohardness

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Authors	BURŠÍKOVÁ Vilma HAJKOVA P. LOUDA P. SPATENKA P. KOLOUCH A. BLAHOVA O.
Year of publication	2006
Type	Article in Periodical
Magazine / Source	Czechoslovak Journal of Physics
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Keywords	nanohardness; Vickers indenter; Berkovich indenter; sapphire; spinel
Description	The aim of the present paper was to comparison of the evaluating methods of thin films nanohardness. Three indentation techniques were compared.
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface