Reakce (NPF2)3 v kapacitně vázaném plazmatu

Warning

This publication doesn't include Faculty of Economics and Administration. It includes Faculty of Science. Official publication website can be found on muni.cz.

Title in English	Reaction of (NPF2)3 in capacitively coupled plasma
Authors	VORÁČ Zbyněk ALBERTI Milan URBANČÍK Petr JANČA Jan
Year of publication	2005
Type	Article in Periodical
Magazine / Source	ChemZi
MU Faculty or unit	Faculty of Science
Citation
Field	Inorganic chemistry
Keywords	Hexafluoro-cyclo-triphosphazene; polymerization; microwave plasma; mass spectrometry
Description	Reaction of (NPF2)3 in capacitively coupled plasma was studied. The polymer layers was studied by means LDI-TOF MS and two groups of fluorophosphazene oligomers were detected in protonised or hydrated form.
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface