Effect of substrate heating and ion beam polishing on the interface quality in Mo/Si multilayers - X-ray comparative study

Warning

This publication doesn't include Faculty of Economics and Administration. It includes Faculty of Science. Official publication website can be found on muni.cz.

Authors	ANOPCHENKO A. JERGEL M. MAJKOVA E. HOLY V.
Year of publication	2001
Type	Article in Periodical
Magazine / Source	Physica B
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Description	Effect of substrate heating and ion beam polishing on the interface quality in Mo/Si multilayers - X-ray comparative study
Related projects:	Self-organization processes on the interfaces during epitaxial growth of semiconductor superlattices