Vibrační a rotační teploty kapacitně vázaných vf výbojů

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Title in English	Vibrational and rotational temperatures of capacitively coupled RF discharges
Authors	TESAŘ Ctibor JANČA Jan
Year of publication	1995
Type	Chapter of a book
MU Faculty or unit	Faculty of Science
Citation
Related projects:	Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates