Interface study of W-Si/Si and obliquely deposided W/Si multilayers by grazing-incidence high-resolution x-ray diffraction

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Authors	JERGEL M. HOLÝ Václav
Year of publication	1995
Type	Article in Periodical
Magazine / Source	J. Phys. D: Appl. Phys.
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Related projects:	Physical properties of new materials and layered structures