The influence of thermal processing on structural and electrical properties of Wx Si 1-x/Si multilayers

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Authors	VÁVRA I. HOLÝ Václav KUBĚNA Josef
Year of publication	1994
Type	Article in Periodical
Magazine / Source	Nuclear Instruments & Methods in Physics Research A
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Related projects:	Physical properties of new materials and layered structures