Application of imaging spectroscopic reflectometry forcharacterization of gold reduction from organometallic compound bymeans of plasma jet technology

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Authors

VODÁK Jiří NEČAS David PAVLIŇÁK David MACÁK Jan ŘIČICA Tomáš JAMBOR Roman OHLÍDAL Miloslav

Year of publication 2017
Type Article in Periodical
Magazine / Source Applied Surface Science
MU Faculty or unit

Central European Institute of Technology

Citation
Web odkaz na web
Doi http://dx.doi.org/10.1016/j.apsusc.2016.10.122
Field Plasma physics
Keywords Gold reduction;Imaging spectroscopic reflectometry;Organometallic compound;Plasma jet
Attached files
Description This work presents a new application of imaging spectroscopic reflectometry to determine a distributionof metallic gold in a layer of an organogold precursor which was treated by a plasma jet. Gold layers wereprepared by spin coating from a solution of the precursor containing a small amount of polyvinylpyrroli-done on a microscopy glass, then they were vacuum dried. A difference between reflectivity of metallicgold and the precursor was utilized by imaging spectroscopic reflectometry to create a map of metal-lic gold distribution using a newly developed model of the studied sample. The basic principle of theimaging spectroscopic reflectometry is also shown together with the data acquisition principles. XPSmeasurements and microscopy observations were made to complete the imaging spectroscopic reflec-tometry results. It is proved that the imaging spectroscopic reflectometry represents a new method forquantitative evaluation of local reduction of metallic components from metaloorganic compounds.
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