Space-filling arrays of three-dimensional epitaxial Ge and Si1-xGex crystals

Falub, C.V.; Isa, F.; Kreiliger, T.; Bergamaschini, R.; Marzegalli, A.; Taboada, A.G.; Chrastina, D.; Isella, G.; Müller, E.; Niedermann, P.; Dommann, A.; Neels, A.; Pezous, A.; Meduňa,  Mojmír; Miglio, L.; von Känel, Hans

Space-filling arrays of three-dimensional epitaxial Ge and Si1-xGex crystals

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Authors	FALUB C.V. ISA F. KREILIGER T. BERGAMASCHINI R. MARZEGALLI A. TABOADA A.G. CHRASTINA D. ISELLA G. MÜLLER E. NIEDERMANN P. DOMMANN A. NEELS A. PEZOUS A. MEDUŇA Mojmír MIGLIO L. VON KÄNEL Hans
Year of publication	2012
Type	Article in Proceedings
Conference	2012 International Silicon-Germanium Technology and Device Meeting, ISTDM 2012 - Proceedings
MU Faculty or unit	Central European Institute of Technology
Citation
Doi	http://dx.doi.org/10.1109/ISTDM.2012.6222457
Field	Solid matter physics and magnetism
Keywords	silicon; heteroepitaxy; x-ray diffraction
Description	The crystalline quality, tilt and strain of the Ge and Si1-xGex crystals were investigated by high resolution X-ray diffraction.
Related projects:	Physical and chemical properties of advanced materials and structures CEITEC - Central European Institute of Technology