Modelling of plasma potential waveform in capacitively coupled discharges
| Authors | |
|---|---|
| Year of publication | 2012 |
| Type | Article in Proceedings |
| Conference | Potential and Applications of Surface Nanotreatment of Polymers and Glass - Book of Extended Abstracts |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | capacitively coupled discharges; plasma potential; higher harmonic frequencies |
| Description | A model of nonlinear electric behaviour of low pressure capacitively coupled discharges is presented. Comparison of the model with an experiment is shown and problematics of discharge asymmetry is discussed. The model demonstrates that the assumption of sheath collapse during the RF period can not be used in accurate calculations. Eigenfrequency of plasma oscillations was studied and it was observed, that this frequency depends mainly on electron concentration and distance between electrodes, but discharge asymmetry and amplitude of discharge voltage influence the eigenfrequency as well. |
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